光电子快报(英文版), 2019, 15 (1): 1, Published Online: Apr. 11, 2019  

A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region

Author Affiliations
Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
Abstract
In this paper, a slot microring resonator with a piece of spiral feedback waveguide for CH4 sensing application is pro-posed. This sensor is based on silicon-on-insulator (SOI) substrate and with the operation wavelength in mid-infrared region. To reach high sensitivity and good selectivity, slot cross section and spiral feedback waveguide are carefully tailored. The sensor shows ppb-scale trace gas sensing potential and is easy to be packaged in integrated photonics circuits. Calculation results show that the sensitivity reaches 1.4×10-2 dB/ppm and the detection limit achieves 700 ppb in the case of Lspiral=100Lr.

XIE Kai-he, ZHANG Xin, ZHANG Xiao-wei, JIN Han, JIAN Jia-wen. A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region[J]. 光电子快报(英文版), 2019, 15(1): 1.

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