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Micro-fabrication process of vapor cells for chip-scale atomic clocks

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Abstract

As the key part of chip-scale atomic clocks (CSACs), the vapor cell directly determines the volume, stability, and power consumption of the CSAC. The reduction of the power consumption and CSAC volumes demands the manufacture of corresponding vapor cells. This overview presents the research development of vapor cells of the past few years and analyzes the shortages of the current preparation technology. By comparing several different vapor cell preparation methods, we successfully realized the micro-fabrication of vapor cells using anodic bonding and deep silicon etching. This cell fabrication method is simple and effective in avoiding weak bonding strengths caused by alkali metal volatilization during anodic bonding under high temperatures. Finally, the vapor cell D2 line was characterized via optical-absorption resonance. According to the results, the proposed method is suitable for CSAC.

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DOI:10.3788/col201917.040202

所属栏目:Atomic and molecular physics

基金项目:This work was supported by the National Key Research and Development Program of China (No. 2017YFB0503200), the National Natural Science Foundation of China (Nos. 61675185 and 61875250), and the Natural Science Foundation of Shanxi Province (No. 201701D121065). Shubin Yan thanks the Fund Program for the Scientific Activities of Selected Returned Overseas Professionals in Shanxi Province, the Program for the Top Young and Middle-Aged Innovative Talents of Higher Learning Institutions of Shanxi, and is sponsored by the Fund for Shanxi ‘1331 Project’ Key Subject Construction.

收稿日期:2018-11-22

录用日期:2019-01-25

网络出版日期:2019-04-12

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Yanjun Zhang:Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Yunchao Li:Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Xuwen Hu:Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Lu Zhang:Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Zhaojun Liu:Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Kaifang Zhang:Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Shihao Mou:Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Shougang Zhang:Key Laboratory of Time and Frequency Primary Standards, National Time Service Center, Chinese Academy of Sciences, Xi’an 710600, China
Shubin Yan:Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China

联系人作者:Shubin Yan(shubin_yan@nuc.edu.cn)

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引用该论文

Yanjun Zhang, Yunchao Li, Xuwen Hu, Lu Zhang, Zhaojun Liu, Kaifang Zhang, Shihao Mou, Shougang Zhang, Shubin Yan, "Micro-fabrication process of vapor cells for chip-scale atomic clocks," Chinese Optics Letters 17(4), 040202 (2019)

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