光子学报, 2019, 48 (4): 0416003, 网络出版: 2019-04-28
氮气流量对磁控溅射制备类金刚石薄膜性能的影响
Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering
DLC薄膜 氮气流量 磁控溅射 透过率 退火 Diamond like carbon thin film Nitrogen gas flow rate Magnetron sputtering Transmittance Annealing
摘要
采用磁控溅射法以石墨为靶材在玻璃衬底上沉积了类金刚石(DLC)薄膜, 用原子力显微镜表征了不同氮气流量条件下生长薄膜的形貌, 用拉曼光谱仪、X射线光电子能谱仪和分光光度计分析了样品的微结构、元素的价态和透光性能.结果表明:沉积的薄膜均为非晶结构.通入2 sccm氮气时, 薄膜的光学透过率大大提高, 此时DLC薄膜内的氮元素含量为5.88%,sp3键百分比为64.65%,ID/IG值为1.81; 掺氮DLC薄膜在可见光范围内光学透过率达到95.69%.随着氮气流量增加, DLC薄膜光学透过率呈现出下降的趋势.退火2 h后不掺氮DLC薄膜光学透过率呈小幅度下降, 而掺氮DLC薄膜的光学透过率几乎没有变化.
Abstract
Diamond Like Carbon(DLC) films were deposited on glass substrates by magnetron sputtering using graphite as the target. The morphology of the films under different nitrogen flow conditions was characterized by atomic force microscopy. Microstructure, valence state of elements and transmittance of the samples were analyzed by Raman spectrometer, X-ray photoelectron spectrometer and spectrophotometer. Results showed that all the deposited films were amorphous. The optical transmittance of the film greatly increased when 2 sccm nitrogen was put in, and the nitrogen content, sp3 bond percentage and ID/IG in DLC film was 5.88%, 64.65% and 1.81, respectively. The optical transmittance of N-doped DLC films in the visible range is about 95.69%. As the nitrogen gas flow rate increased, the optical transmittance of the films decreased. After annealing for 2 h, the optical transmittance of diamond like carbon films with no nitrogen content decreased slightly, while the optical transmittance of diamond like carbon films doped with nitrogen showed little change.
王洪美, 李玉芳, 沈鸿烈, 翟子豪, 陈洁仪, 杨家乐, 杨艳. 氮气流量对磁控溅射制备类金刚石薄膜性能的影响[J]. 光子学报, 2019, 48(4): 0416003. WANG Hong-mei, LI Yu-fang, SHEN Hong-lie, ZHAI Zi-hao, CHEN Jie-yi, YANG Jia-le, YANG Yan. Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering[J]. ACTA PHOTONICA SINICA, 2019, 48(4): 0416003.