太赫兹片上系统是将太赫兹的产生、传输和探测都集中在一个几平方厘米的基片上,线宽及间距达到微米量级, 具有集成化程度高、系统尺寸小、稳定性好以及操作简便的特点, 有利于与微量样品检测技术相互结合。研究采用HFSS软件对共面波导和共面带状线两种太赫兹共面传输线进行了仿真计算, 通过优化传输线的宽度、长度、基底的厚度等关键几何参数确定出最佳的传输线结构;研究工作重点对太赫兹波段的共面带状线结构进行了设计和优化, 实现了在介电常数很小的BCB基底上的低损耗传输。所得到的最佳结构参数为线宽及间距均为20μm, 此结构为后续片上系统实物芯片的制作提供了参数依据。

The THz on-chip system concentrates the generation, transmission and detection of THz on a substrate of several square centimeters. Linewidth and spacing reach micron level, which has the advantages of high integration, small system size, good stability and simple operation, is conducive to the combination of micro-sample detection technology. Two kinds of terahertz coplanar transmission lines, coplanar waveguide and coplanar stripline, are simulated by HFSS software. The optimal transmission line structure is determined by optimizing the key geometric parameters such as the width, length and thickness of the transmission line. The research focuses on the design and optimization of coplanar stripline structure in terahertz band, and achieves low loss transmission on BCB substrate with very small dielectric constant. The optimum structure parameters obtained are line width and spacing of 20μm. This structure provides a parameter basis for the subsequent fabrication of system-on-chip physical chips.