半导体光电, 2019, 40 (2): 181, 网络出版: 2019-05-05
纳米薄膜光纤法布里珀罗传感器的温度特性
Temperature Characteristics of NanoThin Film Fiber FabryPerot Sensor
光纤传感器 纳米薄膜 法布里珀罗 温度特性 理论模拟 fiber optic sensor nanothin film FP temperature characteristics theoretical simulation
摘要
在对薄膜材料热光效应和热膨胀特性研究的基础上, 综合运用光学薄膜法布里珀罗腔(FabryPerot)干涉理论, 采用MATLAB 编程设计了纳米薄膜光纤法布里珀罗传感器的仿真分析程序, 模拟了薄膜型光纤法布里珀罗传感探头反射光谱随温度变化的波长漂移特性, 分析了不同材料热光效应和热膨胀特性对温度特性的影响权重, 并进行了实验验证。验证结果表明, 传感探头测试光谱的温度变化特性与仿真特性一致, 纳米薄膜光纤法布里珀罗传感器的理论仿真可用于选择纳米薄膜材料及筛选温度敏感且镀制容差大的膜系, 对传感探头的研制具有指导意义。
Abstract
The temperature sensing principles of the nanothin film fiber FabryPerot (FP) sensor were analyzd. Based on the research of thermooptic effect and thermal expansion property of the nanothin film materials, MATLAB simulation program was designed to simulate the temperature characteristic of nanothin film fiber FP sensor based on FP interference theory. The influence weights of thermooptic effect and thermal expansion characteristics of different materials on temperature characteristics were analyzed. Experimental result shows that the temperature characteristic of interference fringes is almost the same as simulation.
高晓丹, 彭建坤. 纳米薄膜光纤法布里珀罗传感器的温度特性[J]. 半导体光电, 2019, 40(2): 181. GAO Xiaodan, PENG Jiankun. Temperature Characteristics of NanoThin Film Fiber FabryPerot Sensor[J]. Semiconductor Optoelectronics, 2019, 40(2): 181.