Zara Domain是TFT-LCD(Thin Film Transistor-Liquid Crystal Display)行业TN型产品中常见的不良, 严重影响着产品的良率。本文通过对101.3 mm(3.97 in) TN 产品的大量实验, 系统分析和研究了Zara Domain问题。研究结果表明: 优化产品设计、工艺参数、工艺管控都可有效地管控Zara Domain的发生率。首先通过调控矩阵工厂刻蚀工艺, 确保Shield Bar坡度角保持在45°左右时, Zara Domain发生率为0%。其次在盒工厂摩擦工艺段, 也可通过调控摩擦滚轮的摩擦强度值来提高摩擦后配向能力的均一性来降低Zara Domain的发生率。实验发现当摩擦强度值保持在2.3 N·m时, Zara Domain的发生率＜1%。另外通过改善对盒过程中高温固化的冷却工艺, 在设备上方增加空调扇, 加速冷却, 也可使Zara Domain的发生率<1%。本文通过对101.3 mm(3.97 in) TN产品系统的研究, 有望为解决Zara Domain不良提供一定的技术支持。

Zara Domain is a severe problem in the TFT-LCD production process, especially in the TN production, and already has a great influence on the production yield of the products. In this paper, Zara Domain problem was systematically analyzed and studied by a large number of experiments on 101.3 mm(3.97 in) TN products. The results show that the optimization of product design, process parameters and process control can effectively control the incidence of Zara Domain. Firstly, by adjusting the etching process in the matrix factory, the incidence of Zara Domain is almost 0% when the slope angle of Sheild Bar is kept about 45°. Secondly, in the friction process section of the box factory, the Zara Domain incidence can be reduced by adjusting the friction strength of the friction roller, which can improve the uniformity of the alignment ability after friction. It is found that when the friction strength is kept at 2.3 N·m, the occurrence rate of Zara Domain is less than 1%. In addition, by improving the cooling process of high temperature curing in the box process, such as adding air conditioning fan above the equipment to accelerate cooling, the incidence of Zara Domain can also be less than 1%. Through the study of 101.3 mm(3.97 in) TN product system, it is expected to provide some technical support to solve the Zara Domain problem.