在TFT-LCD（Thin film transistor-liquid crystal display）行业中, 进行摩擦工艺制程时, 玻璃基板与机台接触、分离; 摩擦辊与玻璃基板摩擦、摩擦机台顶针上升过程, 都容易产生静电击穿。针对一款在摩擦工艺过程中产生静电的GOA(Gate driver on Array)产品,结合摩擦工艺参数、生产环境, 进行了一系列静电相关验证。验证发现: 摩擦工艺中摩擦布寿命、环境湿度对静电发生影响很大。摩擦布寿命越靠后, 静电越容易发生; 湿度越大, 静电越不容易发生。摩擦机台顶针上升速度、摩擦布类型也对静电发生有一定影响, 顶针缓慢上升, 静电不容易发生; 摩擦棉布较尼龙布静电效果相对较好。而针对摩擦工艺发生的静电失效不良,光配向替代是一种根本的解决方法,导入光配向工艺后, 摩擦相关静电失效不良由量产6.8%下降为0%。

In TFT-LCD industry, in the rubbing process, the contact and separation between glass and the stage, the friction process between the roller and glass, as well as the process of the rise of stage Pin, are all easy to produce ESD (Electro-static Discharge). For a GOA (Gate driver on Array) product which was Failed because of ESD in the RUB process, a series of ESD-related verifications were conducted in combination with rubbing process parameters and production environment. The verification found that the life of the RUB cloth and the humidity of the environment in the rubbing process have a great influence on the ESD. It is more likely that ESD will happen when the life of the rub cloth is lower. The higher the humidity, the less likely ESD is to occur. The rising speed of table Pin and the type of rubbing cloth also have a certain influence on the occurrence of ESD, The pin rises slowly and the ESD does not easily occur; Cotton is less prone to occurrence of ESD than nylon. For ESD in the rubbing process, optical alignment substitution is a fundamental solution. After the introduction of the optical alignment process, the rubbing-related ESD decreased from 6.8% to 0%.