应用激光, 2019, 39 (2): 346, 网络出版: 2019-06-10   

飞秒激光在微加工领域的研究进展及其应用

Research Progress and Application of Femtosecond Laser in Microfabrication
作者单位
1 苏州大学应用技术学院,江苏 苏州215325
2 同济大学 航空航天与力学学院,上海 200092
摘要
近年来,为了使加工技术更加精准、无误差,各国研究者投入到了微加工领域的研究。而飞秒激光以其极高的峰值、较小的损伤阈值、高的聚焦力,使其成为国内外在微加工领域的热点研究对象。总结了近年来飞秒激光在微加工领域的研究进展,并从微加工金属材料、集成光学、生物医疗、纳米加工领域进行综述,最后指出飞秒激光发展到现在所存在的问题及对未来的期想。
Abstract
In recent years, researchers from various countries have invested in the field of micro-processing research in order to make the processing technology more accurate and error-free. Femtosecond laser has become a hot research topic at home and abroad with its extremely high peak intensity, small damage threshold and high focusing force. In this paper, the research progress of femtosecond laser in the field of microfabrication is reviewed and the research progress in the fields of microfabricated metal materials, integrated optics, biomedical and nano-fabrication is discussed in detail. Finally, the existing problems of femtosecond laser development are pointed out and the expectations for the future are put forward.

杨涵, 于希辰, 吴一帆, 刘海青, 李东亚. 飞秒激光在微加工领域的研究进展及其应用[J]. 应用激光, 2019, 39(2): 346. Yang Han, Yu Xichen, Wu Yifan, Liu Haiqing, Li Dongya. Research Progress and Application of Femtosecond Laser in Microfabrication[J]. APPLIED LASER, 2019, 39(2): 346.

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