曲面投影在显示与光刻领域有着重要的应用价值, 为实现高分辨的曲面投影成像, 提出了以瑞利-索末菲衍射为基础的非均匀采样相位恢复算法, 在设计时准确考虑高空间频率的大角度衍射频谱信息, 使得投影图像分辨率获得有效提升; 建立了衍射面与成像曲面的离散采样方法, 并给出了成像分辨率极限的理论表达式。以“田”字形目标图样在圆柱面成像为例, 对建立的相位恢复算法和理论进行了验证, 结果表明重现的投影像与目标图形符合良好, 分辨率与理论预测一致。

Projection on curved surface has important applications in display and photolithography. A phase retrieval algorithm, using non-uniform sample, was presented for high resolution projection on curved surface based on the Rayleigh-Sommerfeld Integral. The high spatial frequency means large diffraction angle was incorporated into the design, so that the imaging resolution of projection could be improved effectively. The discrete sampling method was established for the diffraction surface and the imaging surface. Then the theoretical equation of limit resolution was given. Finally diffraction optical elements were designed for projection on cylindrical surface with the diffraction pattern of grid, in order to verify the phase retrieval theory. The results show that reconstructed projecting image matches well with the target image, and the resolution is in agreement with theoretical prediction.