光电探测器作为光通信系统的核心器件之一, 其性能对通信质量起着决定性的作用。随着光通信数据量的剧增, 传统的光电探测器已经不能满足需求。文章提出一种集成氮化硅波导的高性能硅基锗单行载流子光电探测器。借助Lumerical FDTD和DEVICE软件进行建模仿真, 通过对波导结构以及探测器尺寸进行设计, 最终该结构在1 550 nm波长和-1 V偏压下, 响应度高达0.97 A/W, 光电流线性输出>30 mA, 3 dB带宽高达28 GHz。

As one of the core devices of optical communication system, the performance of photodetectors plays a decisive role in evaluating the system performance. With the rapid increase of optical communication data, the traditional photodetectors can not meet the demand. This paper presents a high performance silicon based germanium uni-traveling-carrier photodetector integrated with Si3N4 waveguide. With the help of the software of Lumerical FDTD and DEVICE for modeling and simulation, the waveguide structure and the size of photodetector are designed. Finally, the optimized structure could achieve optical responsivity of 0.97 A/W at 1 550 nm wavelength and -1 V bias, with linear output photocurrent greater than 30 mA and electrical 3 dB bandwidth up to 28 GHz.