红外与毫米波学报, 2019, 38 (3): 275, 网络出版: 2019-07-20  

数字递变异变赝衬底上2.6 μm In0.83Ga0.17As/InP光电探测器的性能改进

Improved performances of 2.6 μm In0.83Ga0.17As/InP photodetectors on digitally-graded metamorphic pseudo-substrates
师艳辉 1,2,*杨楠楠 1,2马英杰 1,3,4顾溢 1,3,4陈星佑 1龚谦 1张永刚 1,3,4
作者单位
1 中国科学院上海微系统与信息技术研究所 信息功能材料国家重点实验室, 上海 200050
2 中国科学院大学, 北京 100049
3 中国科学院上海技术物理研究所 传感技术联合国家重点实验室, 上海 200083
4 中国科学院上海技术物理研究所 红外成像材料与器件重点实验室, 上海 200083
摘要
研究了In0.83Al0.17As/In0.52Al0.48As数字递变异变缓冲层结构(DGMB)的总周期数对2.6 μm延伸波长In0.83Ga0.17As光电二极管性能的影响.实验表明, 在保持总缓冲层厚度不变的情况下, 通过将在InP衬底上生长的In0.83Al0.17As/In0.52Al0.48As DGMB结构的总周期数从19增加到38, 其上所生长的In0.83Ga0.17As/In0.83Al0.17As光电二极管材料层的晶体质量得到了显著改善.对于在总周期数为38的DGMB上外延的In0.83Ga0.17As光电二极管, 观察到其应变弛豫度增加到99.8%, 表面粗糙度降低, 光致发光强度和光响应度均增强, 同时暗电流水平被显著抑制.这些结果表明, 随着总周期数目的增加, DGMB可以更有效地抑制穿透位错的传递并降低残余缺陷密度.
Abstract
Impacts of the total period number for the In0.83Al0.17As/In0.52Al0.48As digitally-graded metamorphic buffer (DGMB) on the performances of 2.6 μm In0.83Ga0.17As photodiodes (PDs) have been investigated. An increase of the total period number from 19 to 38 for the In0.83Al0.17As/In0.52Al0.48As DGMB with the same thickness has shown improved crystal qualities for the In0.83Ga0.17As/In0.83Al0.17As photodiode layers grown on such pseudo-substrates. An increased strain relaxation degree up to 99.8%, a reduced surface roughness, enhanced photoluminescence intensities as well as photo responsivities, and suppressed dark currents are observed simultaneously for the In0.83Ga0.17As photodiode on the DGMB with a period number of 38. These results suggest that with more periods, DGMB can restrain the transmission of the threading dislocations more efficiently and reduce the residual defect density.

师艳辉, 杨楠楠, 马英杰, 顾溢, 陈星佑, 龚谦, 张永刚. 数字递变异变赝衬底上2.6 μm In0.83Ga0.17As/InP光电探测器的性能改进[J]. 红外与毫米波学报, 2019, 38(3): 275. SHI Yan-Hui, YANG Nan-Nan, MA Ying-Jie, GU Yi, CHEN Xing-You, GONG Qian, ZHANG Yong-Gang. Improved performances of 2.6 μm In0.83Ga0.17As/InP photodetectors on digitally-graded metamorphic pseudo-substrates[J]. Journal of Infrared and Millimeter Waves, 2019, 38(3): 275.

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