针对环形振动陀螺结构对称、模态特性参数相同与抗干扰特性好的特点, 提出了一种新型的电容式环形微机电振动陀螺。设计了S形弹性支撑梁形式的硅基环形振动陀螺敏感结构, 并仿真分析了陀螺的工作模态与幅频响应特性。根据环形振动陀螺的动力学特性, 研究了陀螺的机电接口形式与硅基电极的设置方法, 建立了硅基电极的电学参数模型与陀螺的角速度敏感模型。基于深离子刻蚀技术设计了简单可行的传感器制备流程, 并成功制备了陀螺的敏感结构。实验测试结果显示, 该环形微机电振动陀螺驱动与检测模态的谐振频率分别为9 028.86 Hz与9 036.15 Hz, 品质因数分别为25 051与25 026, 标度因数为0.589 7 mV/((°)·s-1)。实验结果验证了陀螺设计与研究方法的正确性, 为高性能硅基微机电陀螺的研制提供了一种可行的方案。

A novel MEMS capacitive vibrating ring gyroscope was proposed in this paper based on the advantageous of the ring gyroscope: symmetric resonator, identical mode parameters and excellent anti-interference ability. The sensitive structure of silicon-based capacitive vibrating ring gyroscope with S-shaped elastic supporting beams was designed, and the operating mode and amplitude-frequency response characteristics of the gyroscope were simulated and analyzed. The electromechanical interface and the silicon electrodes setting of the gyroscope were studied, and the electrical parameter model of silicon-based electrodes and theoretical model of gyroscope angular velocity detection were established according to its dynamic characteristics. A simple and feasible processing flow of the gyroscope was prepared by using DRIE technology, and the gyroscope prototype was manufactured successfully. Test results show that the resonance frequency of the gyroscope are 9 028.86 Hz and 9 036.15 Hz with Q-factors of 25 051 and 25 026 in vacuum packaged, respectively, and the scale factor is 0.589 7 mV/((°)·s-1). The experimental results demonstrate the validity and feasibility of the proposed method, which provides an approach to the high-performance silicon-based MEMS gyroscope.