为更好实现可穿戴柔性电子的初期设计和试验验证, 提出了一种基于“切割和粘贴”的柔性电子快速制备方法。首先, 通过对比光刻工艺与喷墨打印工艺, 提出了一种基于激光切割的微纳图案化工艺; 接着, 利用调节聚二甲基硅氧烷(PDMS)基体的黏附力来控制能量释放率, 将带图案的薄膜结构转印到弹性基底; 然后, 为保证金属电极与柔性基体间紧密贴合, 采用PDMS对整体结构进行了封装; 最后, 搭建了多通道生理信号采集系统, 对所加工柔性电极进行电生理测试与医疗探索。实验结果表明: 与传统柔性电子加工工艺相比, 文章提出的工艺效率较高, 成本较低, 可在10 min内完成整套工艺, 同时制备的电子传感器件可以与皮肤保形接触且输出稳定信号, 可为柔性电子的初期设计及后续产业化应用打下基础。

To realize the initial design and experimental verification of wearable flexible electronics, an electronic rapid preparation method based on “cutting and pasting” was proposed. First, a micro-nano patterning process based on laser cutting was presented by a comparison with photolithography and inkjet printing processes. The patterned film structure was then transferred to an elastic substrate by adjusting the adhesion of a polydimethylsiloxane (PDMS) substrate to control the energy release rate. To ensure a close fit between the metal electrode and the flexible substrate, the overall structure was packaged by PDMS. Finally, a multichannel physiological signal acquisition system was built to enable electrophysiological testing and medical exploration. Compared with the traditional flexible electronic processing technology, the proposed method was more efficient and cheaper. In addition, the flexible electronic sensor was in conformal contact with skin and generated a stable signal. This investigation outlines the preliminary foundation and initial design for flexible electronics and their industrial applications.