定量相位显微(Quantitative Phase Microscopy, QPM)将相位成像和光学显微技术相结合, 为微观物体的三维形貌、透明物体的厚度/折射率分布提供了一种快速、无损、高分辨率测量手段。然而, 传统QPM成像系统依然是一个衍射受限系统, 高分辨率与大视场难以同时兼顾。因此, 如何在保持大视场的前提下提高成像空间分辨率是QPM亟需解决的问题之一。近年来, 国内外学者采用离轴照明、散斑照明、结构照明、以及亚像元技术形成“合成数值孔径”, 实现了QPM的大视场、高分辨成像。文中对以上QPM的分辨率增强技术进行了综述, 并对不同方法的优缺点进行了分析。

Quantitative Phase Microscopy (QPM), which combines phase imaging and optical microscopy, has been acting as a fast, non-destructive, and high-resolution methodology to measure the 3D morphology of reflective samples, as well as the inner structure or the refractive index of transparent samples. Similar to other diffraction-limited imaging systems, QPM suffers from the contradiction between spatial resolution and field of view (FOV). Therefore, how to achieve high spatial resolution in a large FOV has attracted a lot of attentions in the field of optical microscopy. In recent years, people utilized off-axis illumination, speckle illumination, structural illumination, and sub-pixel technology to synthesize a larger numerical aperture (SNA), and consequently enhanced the resolution of QPM. The resolution enhancement technologies of QPM were reviewed in this paper. The advantages and limitations of different methods were analyzed.