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长工作距变焦显微系统物镜设计

Design of zoom microscope objective with long working distance

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摘要

激光内雕机在进行激光内雕时, 经常会存在激光“炸点”不均匀的情况, 需要对其进行放大分析, 从而更好地控制激光束的能量。根据企业激光内雕“炸点”观察需求, 设计了一款长工作距变焦显微物镜。玻璃内部的“炸点”观察范围为9~32 mm, 系统采用光学变焦方式, 变焦范围为6~24 mm, 放大倍率为4×~16×, 变倍比为4倍。探测器采用了一款型号为VA-1MG2的1/2 in(1 in=2.54 cm)CCD, 其像元大小为5.5 ?滋m。利用Zemax进行光学系统设计优化, 在截止频率91 lp/mm处, 各组态下各视场的MTF值均大于0.4, 在中心视场和0.7视场处均接近衍射极限。点列图的RMS半径也均小于艾里斑半径, 满足长工作距变焦显微系统的各项指标需求。

Abstract

When a laser engraving machine carries out laser engraving, sometimes the laser "bursting points" are uneven. It is necessary to amplify and analyze the laser "explosion points" to better control the energy of the laser beam. A zoom microscope objective with long working distance was designed according to the observation requirements of "explosion points". The "explosion points" inside the glass have the viewing range of 9-32 mm. The zoom range of focal length is from 6 mm to 24 mm with optical zoom mechanism. The magnification is 4×-16×, and the zoom ratio is 4. A 1/2-inch CCD model VA-1MG2 was adopted as the detector with pixel size 5.5 ?滋m. The optical system optimization was carried out by using Zemax. The MTF values of all fields are larger than 0.4 at cut-off frequency 91 lp/mm for each configuration. The MTF values for central field and 0.707 field approach to the diffraction limit. The RMS radius of the spot diagram is smaller than the radius of Airy disk. The image quality of the designed system meets the requirements of all technical indicators.

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中图分类号:TB851

DOI:10.3788/irla201948.0618003

所属栏目:光学设计及仿真

基金项目:吉林省发改委产业创新专项资金(2017C037-1)

收稿日期:2019-02-13

修改稿日期:2019-03-16

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作者单位    点击查看

张润泽:长春理工大学 光电工程学院, 吉林 长春 130022
陈 宇:长春理工大学 光电工程学院, 吉林 长春 130022
张家铭:长春理工大学 光电工程学院, 吉林 长春 130022
李 阳:长春理工大学 光电工程学院, 吉林 长春 130022
张 健:长春理工大学 光电工程学院, 吉林 长春 130022

联系人作者:张润泽(893205262@qq.com)

备注:张润泽(1995-), 女, 硕士生, 主要从事光学设计和制造技术方面的研究。

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引用该论文

Zhang Runze,Chen Yu,Zhang Jiaming,Li Yang,Zhang Jian. Design of zoom microscope objective with long working distance[J]. Infrared and Laser Engineering, 2019, 48(6): 0618003

张润泽,陈 宇,张家铭,李 阳,张 健. 长工作距变焦显微系统物镜设计[J]. 红外与激光工程, 2019, 48(6): 0618003

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