光电子技术, 2019, 39 (2): 123, 网络出版: 2019-07-31
车载TFT LCD器件高温信赖性串扰机理及改善研究
Mechanism and Improvement on High Temperature Crosstalk in Vehicle TFT LCD Devices Reliability Test
摘要
研究了车载液晶显示器可靠性试验中高温串扰的相关影响因子,通过实验发现TFT沟道N+台阶越大,高温串扰表现越差,通过增加工艺中灰化时间可以改善沟道台阶问题。同时栅极绝缘层的厚度也会对可靠性评价中的高温串扰产生影响。并且通过DOE实验确定可靠性串扰的显著影响因子为沟道N+台阶和栅绝缘层厚度。
Abstract
The factors of vehicle LCD high temperature crosstalk in reliability test were studied. It was found that the bigger the N+ step remain of TFT channel was, the worse the high temperature crosstalk became. The N+ step remain could be improved by increasing ashing time of N+ etch process. Thickness of gate insulator would also affect the crosstalk. The DOE experiments show that the significant factors affecting reliability crosstalk are N + step remain of TFT channel and thickness of gate insulator.
苏磊, 杨小飞, 李兴华, 刘旭, 牟勋, 孟佳. 车载TFT LCD器件高温信赖性串扰机理及改善研究[J]. 光电子技术, 2019, 39(2): 123. SU Lei, YANG Xiaofei, LI Xinghua, LIU Xu, MOU Xun, MENG Jia. Mechanism and Improvement on High Temperature Crosstalk in Vehicle TFT LCD Devices Reliability Test[J]. Optoelectronic Technology, 2019, 39(2): 123.
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