传统光谱成像系统采用探测器与传统分光元件耦合的方式, 体积较大、定制化能力不足。微/纳光机电系统的快速发展, 为微型化光谱成像系统提供了解决途径。基于表面等离激元学和光学超表面的微纳滤波结构, 可实现像素级的光场调控, 有望替代传统滤波器件并具有与成像系统片上集成的潜力。近年来, 集成了动态或静态滤波结构的光谱成像微系统已崭露头角, 逐渐构建起全新的光谱成像方法, 但在原理机制、器件性能、制造成本、集成装配工艺等方面还有许多需要攻克的难题。本文综述了国内外在像素级微纳滤波结构、滤波和成像器件的集成制造和装配等方面的研究进展, 梳理了光学滤波-探测集成器件的发展脉络, 探讨了其局限性并展望了发展趋势。

The majority of the present spectral imaging systems couple traditional filters with photodetectors, which are too large and cannot be customized. The rapid advances in micro/nano-opto-electro-mechanical systems have provided effective solutions for the continuing miniaturization of spectral imaging systems. Based on plasmonics and optical metasurfaces, micro/nano color filters are capable of regulating light fields at the pixel level and thus have the potential to replace traditional filters and to be integrated with imaging systems on chips. In recent years, microspectral imaging systems integrated with dynamic or static filters have come to the forefront of new research and are enabling the development of new methods of spectral imaging. However, complete understanding of the fundamental theories of plasmonic filters remains elusive. In addition, a host of problems exist in terms of device performance, manufacturing cost, and assembly processes. In this review, we present the research progress of pixel-level integrated microdevices for spectral imaging, including micro/nano color filters, integrated manufacturing of filters and imagers, and assembly techniques of microspectral imaging systems. We also summarize the limitations and discuss the development trends of microspectral imaging systems.