为了精密检测靶丸X射线光学厚度均匀性, 建立了基于精密轴系和光纤阵列探测的靶丸X射线光学厚度检测装置, 开展了光学厚度轮廓仪光路精密调校技术的研究, 应用白光共焦光谱技术和光学显微成像技术, 解决了气浮转台精密调整、X射线光路对中的难题, 实现了对塑料靶丸壳层缺陷、表面质量、壁厚均匀性、壳层材料成分均匀性等多种耦合扰动综合效应的表征。对系统的稳定性进行了测试, 实验结果表明, 该系统的测量重复性偏差可基本控制在0.01%以内, 空间分辨率约为100 μm, 满足ICF靶物理研究对靶丸X射线光学厚度扰动的高精度检测需求。

To precisely measure the x-ray optical thickness of laser inertial confinement fusion capsules, an experimental apparatus based on a precision gas spindle and fiber array detectors is developed. By utilizing the chromatic confocal spectrum and optical microscopy, the problems of fine adjustment of the gas spindle and alignment of the X-ray optical path are solved successfully. The obtained x-ray optical thickness data provide information about local defects, surface quality, distribution of thickness, and composition. The results of the systematic stability demonstrate that the x-ray optical thickness of capsules can be measured precisely with a maximum repeatability deviation of 0.01% and a lateral resolution of 100 μm.