为了减小X-Y直线电机精密运动平台同步控制的轮廓误差, 提高系统的控制精度, 针对传统交叉耦合控制结构的不足, 提出多电机控制系统的轮廓误差主动补偿结构。首先, 以永磁同步直线电机为例分析单轴伺服定位跟踪误差, 指出跟踪误差和位置参考有关, 结合实际工况中参考指令的扰动, 将耦合补偿量最终统一为参考指令的校正加入到系统中, 提出轮廓误差主动补偿结构, 将轮廓误差补偿量分别补偿到各轴伺服的位置环和速度环, 并通过仿真和实验进行验证。结果表明: 采用主动补偿方法的X-Y两轴运动平台跟踪大曲率复杂轨迹的轮廓误差平均值为20.68 μm; 单轴跟踪误差最大值为70 μm。相比传统交叉耦合控制结构, 主动补偿结构轮廓误差精度提高了15.5%, 同时降低了单轴的跟踪误差, 并能抑制参考指令扰动。

To address the deficiencies of the traditional cross-coupling control structure, an active compensation control structure was proposed in this study to reduce the contour error of an X-Y linear motor precision motion platform. First, a permanent magnet synchronous linear motor was used to analyze the single-axis positioning tracking error, where the tracking error was related to the position reference. Therefore, adjustment to the amount of coupling compensation to the reference instruction was added to the system, which considered the disturbance of the reference command in the actual working condition. The contour error components were compensated to the position and speed loops of each axis servo and verified by a simulation and an experiment. Results show that the average value of the contour error of the X-Y axis motion platform when tracking a large curvature complex track using an active compensation method is 20.68 μm. The single-axis tracking error is 70 μm. Compared with the traditional cross-coupling control structure, the accuracy of the active compensation structure contour error is improved by 15.5%, the single-axis tracking error is reduced, and the reference command disturbance can be suppressed.