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多工位尖角电极电火花成形微尖槽结构

Micro sharp groove by EDM with multi-station shape-angle electrode

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摘要

针对加工某微小装置的局部微尖槽形状精度难以保证的问题, 提出一种多工位尖角电极电火花成形的方法。以304不锈钢为工件材料, 选择纯铜和铜钨合金(W75%)作为电极材料并进行试验比较。为减小电极损耗和重复定位误差对加工精度的影响, 采用慢走丝电火花线切割加工多工位尖角电极, 然后利用多工位尖角电极电火花成形夹角为16°、深度为0.36 mm的微尖槽。结果表明: 采用较低进给速度, 恒速多次线切割的方法能制作出质量较好的多工位尖角电极; 尖槽成形精度随着工位数的增加而提高, 且相同工位数时由于铜钨合金电极的低损耗性能使尖槽成形精度更好。最终采用6工位的铜钨合金电极成形微尖槽角度为16.3°, 相对误差1.9%; 深度为0.356 mm, 相对误差1.1%, 形状精度也较好。该方法可以满足某微小装置中微尖槽部分的加工精度和使用要求。

Abstract

To solve the difficulty of ensuring the shape accuracy of micro grooves in a micro device, a new method of using multi-station shape-angle electrodes through Electrical Discharge Machining (EDM) was proposed. A total of 304 stainless steel samples were used as workpiece materials, and pure copper and copper-tungsten alloy (W75%) were selected and compared as electrode materials. To reduce the influence of electrode wear and installation error, multi-station shape-angle electrodes were machined by low-speed Wire-cut EDM (WEDM), and then a 16° and 0.36-mm-depth groove was formed by EDM. Results show that a multi-station shape-angle electrode having enhanced surface quality can be fabricated using a lower feed rate, a constant speed, and multiple cutting through WEDM. The forming accuracy of the grooves was improved with the increase in the number of stations, and the forming accuracy of the copper-tungsten alloy was improved as a result of its low loss at the same station number. Therefore, a six-station copper-tungsten electrode was used to machine the workpiece with a sharp angle of 16.3° (relative error of 1.9%), a 0.356-mm depth (relative error of 1.1%), and improved form accuracy. This method can meet the processing accuracy and application requirements of sharp grooves in a micro device.

Newport宣传-MKS新实验室计划
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中图分类号:TG661

DOI:10.3788/ope.20192707.1569

所属栏目:微纳技术与精密机械

基金项目:国家重点研发计划资助项目(No.2016YFC1202503);国家科技支撑计划资助项目(No.2015BAI03B08)

收稿日期:2019-01-28

修改稿日期:2019-03-22

网络出版日期:--

作者单位    点击查看

宋满仓:大连理工大学 精密与特种加工教育部重点实验室, 辽宁 大连 116024三菱电机 大连理工大学 电加工技术中心, 辽宁 大连 116024
李 阳:大连理工大学 精密与特种加工教育部重点实验室, 辽宁 大连 116024三菱电机 大连理工大学 电加工技术中心, 辽宁 大连 116024
刘军山:大连理工大学 精密与特种加工教育部重点实验室, 辽宁 大连 116024大连理工大学 辽宁省微纳米技术及系统重点实验室, 辽宁 大连 116024

联系人作者:宋满仓(mcsong@dlut.edu.cn)

备注:宋满仓(1964-), 男, 辽宁本溪人, 博士, 副教授, 1989年于清华大学获得硕士学位, 2005年于大连理工大学获得博士学位, 主要从事模具设计与制造技术及电火花加工工艺的研究。

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引用该论文

SONG Man-cang,LI Yang,LIU Jun-shan. Micro sharp groove by EDM with multi-station shape-angle electrode[J]. Optics and Precision Engineering, 2019, 27(7): 1569-1576

宋满仓,李 阳,刘军山. 多工位尖角电极电火花成形微尖槽结构[J]. 光学 精密工程, 2019, 27(7): 1569-1576

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