精密测量是精密机械加工的基础, 是制造行业中影响制造精度的决定性因素之一, 在当代精密机械制造领域应用广泛。基于光栅的精密位移测量系统以其对环境要求小, 测量分辨率高等优点, 在精密位移测量领域占据重要位置。基于光栅的精密位移测量系统包括光学测量系统、信号接收、电子学细分及整体装调几部分。本文主要针对光学测量光路部分进行综述介绍。首先介绍了经典光栅干涉位移测量原理; 其次, 综述了基于光栅的精密位移测量系统的关键技术现状; 再次, 对比分析了几种最具有代表性的测量技术, 总结其优缺点; 最后, 对基于光栅的精密位移测量技术进行展望, 揭示其高精度、高分辨力、高鲁棒性、微型化、多维化、多技术融合的发展趋势。

Precision measurement is the basis of precision machining and it′s one of the decisive factors of manufacturing accuracy in the manufacturing industry. It is widely used in the field of contemporary precision machinery manufacturing. The grating-based precise displacement measurement system play an important role in the field of precise displacement measurement because of its small environmental requirements and high resolution. The grating-based precise displacement measurement system includes optical measurement, signal reception, electronic subdivision and integral adjustment. In this paper, the optical path of optical measurement is introduced. Firstly, the principles of classical grating interferometric displacement measurement are introduced. Secondly, the key technologies of the grating-based precise displacement measurement system are summarized. Thirdly, the latest representative measurement techniques are compared and analyzed, and their advantages and disadvantages are summarized. Finally, prospects are provided for the future of grating-based precise displacement measurement technology wherein the the development trend of its high precision, high resolution, high robustness, miniaturization, multi-dimension and multi-technological fusion are revealed.