惯性传感器被广泛应用于地球重力场反演、等效原理验证等科学实验中, 用来测量空间非保守力作用引起的微小加速度扰动以实现航天器的无拖曳控制。目前国内外正在大力开展的空间引力波探测计划中, 惯性传感器作为核心测量载荷主要用于屏蔽外界噪声扰动, 并通过静电控制和微推进器的测量及补偿实现测试质量在空间敏感轴方向自由漂浮运动。本文以静电悬浮式惯性传感器电容结构为基础, 结合系统静电力驱动控制的工作原理, 并以实际的加工条件为依据, 对电极不对称性这一系统自身的误差来源展开分析, 通过对各种不对称情况的系统性能影响比较分析, 得到电极不对称性对于系统性能, 特别是量程损失的影响显著。在此基础上结合实际加工条件得出将加工线度尺寸误差控制在10 μm以内, 面积不对称性控制在1%~2%之间的基本要求, 以降低其对系统测量范围的限制, 进而提高科学目标。

Inertial sensors are widely used to measure small disturbances in acceleration caused by non-conservative forces in space and to realize the drag-free control of spacecrafts in scientific experiments, such as earth gravity field inversion and equivalent principle verification. In the space gravitational wave detection researchbeing carried out at home and abroad, the inertial sensor is used as the core measurement load to shield external noise and achieve free-fall motion of the Test Mass in the direction of the space sensitive axis through electrostatic control. In this paper, on the basis of the electrostatic suspension inertial sensor capacitor structures, with consideration to the working principle of the electrostatic force driving control system and based on actual processing conditions, the source of error in the system asymmetry is analyzed. Through comparative analysis of the system′s performance effects on various asymmetry conditions, the asymmetry of the electrods is obtained, especially in the range of high loss in performance. On this basis, combined with the actual processing conditions, the basic requirements to control the dimensional error of the machining line within 10 μm and the area asymmetry between 1% and 2% are obtained, so as to reduce the measurement range limitation of the system and improve its scientific goal.