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近红外激光薄膜滤光片的研制

Fabrication of Nearinfrared Laser Film Filter

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摘要

以双抛Si片为基底, 采用离子束辅助热蒸发沉积技术研制了1.2~3 μm波段激光薄膜滤光片.采用长波通滤光片与减反射膜相结合的薄膜样品设计方法, 高、低折射率材料分别选用ZnS和MgF2, 综合考虑光谱特性和电场强度分布, 使用TFCale膜系软件设计出1.064 μm高反、1.2~3 μm波段增透的长波通滤光片.长波通膜系膜系结构为G|4H2L1.5H2L2H1.5L2H4L|A, 减反射膜膜系结构为G|3.5H3.5L|A.最终实现1.2~3 μm波段峰值透过率达98.48%, 平均透过率为92.35%, 1.064 μm处透过率为5.09%的光谱特性.对薄膜样品分别采用离子束处理和退火处理, 发现适当的工艺参数, 有助于提高薄膜激光损伤阈值, 当退火温度为250℃时, 其激光损伤阈值可达6.3 J/cm2.本文研究可为近红外薄膜滤光片设计和制备提供参考.

Abstract

A 1.2~3μm band laser film filter was developed on doubleside polished Si substrate using the ion beamassisted thermal evaporation deposition technique. The film sample was designed combination of long wave pass filter film and antireflection film. The high and low refractive index materials are ZnS and MgF2 monolayer films, respectively. Considering the spectral properties and intensity distribution of electric field, the 1.064 μm high reflection and 1.2~3 μm antireflection long wave pass filter were designed by a TFCale software. The longpass film system structure and the antireflection film structure are G|4H2L1.5H2L2H1.5L2H4L|A and G|3.5H3.5L|A, respectively. The results show that the peak transmissivity can approach 98.48%, the average transmissivity is 92.35% at the wavelength of 1.2~3 μm, and the transmissivity is 5.09% at the 1.064μm band. By ion beam and annealing treatment, It was found that the appropriate processing parameters contributed to the improvement of the laser induced damage threshold, when the annealing temperature is 250℃, the laser induced damage threshold is 6.3 J/cm2. This research provides application value for the design and preparation of near infrared thin film filters.

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中图分类号:O484

DOI:10.3788/gzxb20194809.0931001

基金项目:陕西省国际科技合作与交流计划资助项目(Nos.2016KW036, 2018KWZ02),西安市智能探视感知重点实验室项目(No.201805061ZD12CG45)

收稿日期:2019-05-06

修改稿日期:2019-06-25

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李候俊:西安工业大学 陕西省薄膜技术与光学检测重点实验室, 西安 710072
徐均琪:西安工业大学 陕西省薄膜技术与光学检测重点实验室, 西安 710072
王建:西安工业大学 陕西省薄膜技术与光学检测重点实验室, 西安 710072
李绵:西安工业大学 陕西省薄膜技术与光学检测重点实验室, 西安 710072
苏俊宏:西安工业大学 陕西省薄膜技术与光学检测重点实验室, 西安 710072

联系人作者:李候俊(271671060@qq.com)

备注:李候俊(1989-), 男, 硕士研究生, 主要研究方向为光学薄膜技术.

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引用该论文

LI Houjun,XU Junqi,WANG Jian,LI Mian,SU Junhong. Fabrication of Nearinfrared Laser Film Filter[J]. ACTA PHOTONICA SINICA, 2019, 48(9): 0931001

李候俊,徐均琪,王建,李绵,苏俊宏. 近红外激光薄膜滤光片的研制[J]. 光子学报, 2019, 48(9): 0931001

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