红外与激光工程, 2019, 48 (9): 0913004, 网络出版: 2019-10-12   

基于包-全法的红外滤光片光学参数测量方法

Optical parameters measurement of infrared filter based on envelope-full spectral fitting inversion method
作者单位
兰州空间技术物理研究所 无锡泓瑞航天科技有限公司,江苏 无锡 230000
摘要
为了研究准确性更高的复杂多层膜光学参数测量方法,测量实际镀制红外带通滤光片的光学参数,对红外滤光片研制过程的设计优化与工艺的改进具有重要的指导作用。首先,在研究传统薄膜光学参数光谱测量方法的基础上,提出了包-全法,并研究了该方法的基本思想、物理模型以及优化算法;其次,设计制备了2 000~8 000 nm谱段内膜料单层膜和高透射率、宽截止中波带通红外滤光片,通过对比测量单层膜光学参数反演计算光谱与实测光谱的差异,验证了包-全法测量膜料单层膜光学参数的准确度及有效性,依据测量结果确定了膜料色散关系,甄别了膜层工艺的优劣;最后,采用包-全法与全光谱拟合反演法对红外滤光片的光学参数作了对比测量验证。结果证明:该方法能够准确测量红外滤光片的光学参数,测量结果可用于指导修正设计与工艺之间的匹配性,进而研制了性能更好的红外滤光片。
Abstract
The high performance measuring methods to measure the optical parameters of infrared band-pass filter with complex multilayer were significantly important to improve the design and technology of the infrared filter development. Firstly, the traditional spectral measurement methods were fully analyzed, and an envelope-full spectral fitting inversion method was proposed. The basic idea, physical model and optimization algorithm of the new method were discussed in detail. Secondly, a technique for fabricating a single-layer film and infrared filter with high transmittance and wide cut-off medium-band bandpass in the 2 000-8 000 nm spectral range was designed, and the experiments to compare the difference between the actual spectrum and the spectrum calculated with the optical parameters measured by the new method were performed. The results show that the new method not only has very high precision performance, but also can identify the quality of the film process and can determine the dispersion of the film by the measurement results. The another set of experiments on the measurement of optical parameters of infrared filter illustrates that, compared with traditional full spectrum fitting inversion method, the new method not only has high-precision measurement results, but also can quickly and accurately locate the divergence between the actual plating thickness and the design thickness with the measured optical parameters, then a better high-performance infrared filter was developed.

李凯朋, 王济洲, 王多书, 王云飞, 董茂进. 基于包-全法的红外滤光片光学参数测量方法[J]. 红外与激光工程, 2019, 48(9): 0913004. Li Kaipeng, Wang Jizhou, Wang Duoshu, Wang Yunfei, Dong Maojin. Optical parameters measurement of infrared filter based on envelope-full spectral fitting inversion method[J]. Infrared and Laser Engineering, 2019, 48(9): 0913004.

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