Laue晶体单色器常用于单色化高能X射线（＞50 keV），通过对其晶片压弯可以实现高能光束聚焦。晶片压弯过程中会不可避免地产生扭曲，从而影响单色器的工作效率。利用波动光学仿真的方法，分析弯晶面形扭曲对Laue晶体单色器性能的影响，并提出一种角位移微调轴角装置，用来消除这种扭曲。该装置基于直梁型柔性铰链，利用叠加原理和对称结构。利用有限元方法分析了该装置的力学性能。分析结果表明，轴角装置的转角范围为±2°时，其转动中心最大偏移为20 μm，实现了角位移分辨率好于1″，动态范围达到104，达到设计目标。

Laue crystal monochromator are commonly used to monochromate high-energy X-rays (above 50 keV). Through bending the thin crystal, focused monochromatic beams could be obtained. However, twisted deformation would inevitably occur during bending crystal, which seriously affects monochromator efficiency. In this paper, wave optics simulation method was applied to study the influence of the bent crystal twisted on the performance of the Laue crystal monochromator. Moreover, in order to eliminate the crystal twist, a rotary mechanism of rotation angle fine adjustment was designed. The rotary mechanism includes a series of flexure hinges arranged symmetrically. Furthermore, the dynamics performances of the mechanism were also analyzed by using finite element method. The results show that when the rotation angle was within ±2°, the maximum shift of rotation center was less than 20 μm, the angular resolution achieved less than 1″ and dynamic range was up to 104,which totally meet the design requirements.