为了确保窄脉宽XeCl准分子激光系统获得高峰值功率紫外激光脉冲，实验研究了紧凑型四向电子束泵浦XeCl准分子激光器的输出特性。通过调节激光腔室气体介质的总气压和气体摩尔比、激光器的充电电压、二极管阳极钛箔厚度等参数，发现了激光能量随以上条件的变化规律，分析得到了激光器运行的最佳条件。在最佳条件下XeCl准分子激光器的脉冲能量大于100 J、脉宽约200 ns，电光效率约为5.81‰。另外，通过改变激光器内部Marx发生器的开关气压，研究了紧凑型电子束泵浦XeCl准分子激光器输出激光脉冲的延迟抖动特性，发现激光脉冲的延迟抖动可优于20 ns。研究结果表明: 紧凑型电子束泵浦XeCl准分子激光器可实现脉冲抖动小于20 ns、103 J的高能紫外激光输出，可满足窄脉宽XeCl准分子激光系统运行的需要。

To insure that a high peak power ultraviolet laser pulse of the short pulse XeCl excimer laser system was obtained, experimental study on laser output characteristic of the compact XeCl excimer laser by pumped electron-beam form four directions was carried out. Via varieties of total pressure and component molar rate of gas mixtures in laser chamber, charge voltage of laser and thickness of titanium foil utilized as the anode, effects of them on pulse energy were showed. With the result that the optimal operation condition for the compact XeCl excimer laser by pumped electron-beam was discovered, the energy of the laser pulse of about 200 ns duration at half-amplitude exceeded 100 J under the optimal operation condition，and the electro-optical efficiency was about 5.81‰. In addition, the pulse jitter of the compact XeCl excimer laser was experimentally researched, and the pulse jitter was little 20 ns. Researches show that a little 20 ns pulse jitter and 103 J high energy ultraviolet laser pulse of the compact XeCl excimer laser by pumped electron-beam is obtained, and the result may be meeting demands of the short pulse XeCl excimer laser system.