红外技术, 2019, 41 (10): 902, 网络出版: 2019-12-05   

离子束溅射 Al2O3薄膜及其在蓝宝石窗口中的应用

Ion Beam Sputtering Alumina Film and Application in Sapphire Optical Windows
作者单位
西安应用光学研究所, 陕西西安 710065
摘要
为了研究 Al2O3薄膜在蓝宝石光学窗口中的应用, 采用离子束溅射技术制备了不同工艺条件下的 Al2O3薄膜, 根据薄膜的测试结果对薄膜的折射率和消光系数进行了拟合, 分析了工艺条件对 Al2O3薄膜性能的影响。在蓝宝石窗口上用 ZnS和 Al2O3作为高、低折射率材料, 设计并制备了电视(600~ 900 nm)和中红外(3.4~4.8 .m)双波段高效减反射薄膜, 测试结果表明, 薄膜的减反射效果良好, 具有较强的环境适应性, 适合于作为光学窗口薄膜。而 Al2O3薄膜吸潮引起的 2.8~3.5 .m波段的吸收, 以及蓝宝石基片在 4.0 .m之后的吸收是造成透射率较低的主要原因。
Abstract
To study the application of Al2O3 films in optical windows, thin Al2O3 films were prepared using ion beam sputtering technology under different process conditions. According to the test results of the thin films, the refractive index and extinction coefficient of the films were fitted, and the influence of the process conditions on the performance of the thin Al2O3 films was analyzed. ZnS and Al2O3 were used as materials on a sapphire substrate to design and prepare high-efficiency anti-reflection films. The test results demonstrated that the films exhibited a good anti-reflection effect and strong environmental adaptability, which made them suitable for mid-infrared windows. The absorption of the 2.8–3.5 .m band caused by the moisture absorption of the Al2O3 films and the absorption of substrates longer than 4.0 .m were the main reasons for the lower transmission.

米高园, 杨崇民, 张建付, 王松林, 刘青龙, 朱筱群, 李明伟. 离子束溅射 Al2O3薄膜及其在蓝宝石窗口中的应用[J]. 红外技术, 2019, 41(10): 902. MI Gaoyuan, YANG Chongmin, ZHANG Jianfu, WANG Songlin, LIU Qinglong, ZHU Xiaoqun, LI Mingwei. Ion Beam Sputtering Alumina Film and Application in Sapphire Optical Windows[J]. Infrared Technology, 2019, 41(10): 902.

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