激光技术, 2019, 43 (6): 846, 网络出版: 2019-12-08   

基于高斯光束的飞秒激光光束质量检测技术

Detection technology of femtosecond laser beam quality based on Gaussian beam
作者单位
新疆大学 物理科学与技术学院, 乌鲁木齐 830046
摘要
为了研究飞秒激光光束质量因子M2基于高斯光束的传播特性和能量密度分布, 在对飞秒激光光束质量因子进行理论研究的基础上,进行了相应的数据计算, 给出了飞秒激光脉冲照射屏幕表面时所形成的环形光斑宽度的测量方法, 设计了一套由飞秒激光器、透镜、介电材料玻璃屏幕所组成的实验平台;将该方法与刀口法和CCD法测量值进行了对照,并用刀口法、CCD法确认了飞秒激光束腰在不同位置时的激光光束质量因子取值范围。结果表明, 光束质量因子M2在x和y方向上的测量值分别为2.04,1.24。该实验结果与理论分析基本一致, 比刀口法和CCD法结构简单, 所得结论数据可靠、执行方便, 对精密测量有一定的参考价值。
Abstract
In order to study the propagation characteristics and energy density distribution of femtosecond laser beam quality factor M2 based on Gaussian beam, on the basis of theoretical study of femtosecond laser beam quality factor, the corresponding data were calculated. The measurement method of annular spot width formed by femtosecond laser pulse irradiating the screen surface was given. An experimental platform consisting of femtosecond laser, lens and dielectric glass screen was established. The method was compared with the knife-edge method and the CCD method.The range of laser beam quality factor at different positions of femtosecond laser beam waist was confirmed by knife-edge method and CCD method. The results show that the measured values of beam quality factor M2 in x and y directions are 2.04 and 1.24, respectively. The experimental results are basically consistent with the theoretical analysis. Compared with knife-edge method and CCD method, the structure is simple. The data obtained are reliable and easy to carry out. It has certain reference value for precise measurement.

艾尼江·阿塔伍拉, 阿布都热苏力·阿不都热西提. 基于高斯光束的飞秒激光光束质量检测技术[J]. 激光技术, 2019, 43(6): 846. Ainijiang ATAWULA, Abuduresuli ABDUREXITI. Detection technology of femtosecond laser beam quality based on Gaussian beam[J]. Laser Technology, 2019, 43(6): 846.

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