红外与激光工程, 2019, 48 (11): 1117002, 网络出版: 2019-12-09   

磁场辅助激光沉积类金刚石膜初探

Pre-research on the diamond-like carbon film prepared by magnet-assistant pulsed laser deposition
作者单位
陆军工程大学 光电技术研究所, 湖北 武汉430075
摘要
提出了磁场辅助激光沉积类金刚石(DLC)膜技术, 在硅基底附近添加磁力线向基底收拢的磁场, 用以迫使侧向飞行的离子向基底靠拢并参与成膜。由于离子向基底的集中, 使其在膜层中含量大幅上升, 间接地减少了大颗粒的比例, 因此, 与无磁场条件下制备的DLC膜相比, 引入磁场不仅提高了DLC膜的沉积速率, 而且提高了其机械硬度; 更重要的是, 间接地证明了激光对靶材离化的高效性, 为脉冲激光沉积(PLD)结合磁过滤技术提供了可行性的依据。
Abstract
The technology of magnet-assistant pulsed laser deposition was advanced. A magnetic field whose magnetic lines pointed to the substrate was fixed around the silicon substrate when the diamond-like carbon(DLC) film was prepared by pulsed laser deposition(PLD), so that the ions those flied outside of the substrate were drove to fly to the substrate potentially and participate in the course of filming. The concentration of the ions increased based on the centralization of the ions, and the content of the non-electriferous granule reduced indirectly. Compared with the DLC film prepared without magnetic field, not only the deposition velocity of the DLC film prepared under magnetic field increased sharply, but also the mechanical hardness improved. Of the most importance, this research testified to the high efficiency of the ionization by the laser to the target, offering the base of the feasibility to the combinability between the technologies of the PLD and filtration by magnetic field.

程勇, 陆益敏, 黄国俊, 米朝伟, 黎伟, 田方涛, 王赛. 磁场辅助激光沉积类金刚石膜初探[J]. 红外与激光工程, 2019, 48(11): 1117002. Cheng Yong, Lu Yimin, Huang Guojun, Mi Chaowei, Li Wei, Tian Fangtao, Wang Sai. Pre-research on the diamond-like carbon film prepared by magnet-assistant pulsed laser deposition[J]. Infrared and Laser Engineering, 2019, 48(11): 1117002.

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