为研究光学微球腔的热光效应，采用1 550 nm波段可调谐激光器和宽带光源两种泵浦源，分别测量了二氧化硅、碲酸盐玻璃微球及其掺杂了稀土离子的微球在激励光功率、环境温度变化时其谐振峰波长的变化量，得到了二氧化硅微球激励功率灵敏度为32.4 pm/mW，温度灵敏度为13.4 pm/℃；铥离子的掺杂使激励功率灵敏度达到48.7 pm/mW，温度灵敏度达到15.2 pm/℃.相应的碲酸盐微球激励功率灵敏度为71.1 pm/mW，温度灵敏度为0.019 1 nm/℃，比光纤光栅温度传感器的灵敏度10 pm/℃大了将近1倍，若掺杂了稀土离子，则高1.1倍.本文研究对微腔在温度传感器方面的应用具有参考意义.

In order to study the thermo-optic effect of the optical microsphere cavity, two kinds of pump sources, 1 550 nm band tunable laser and broadband light source, were used to measure the change of the resonance peak wavelength of silica, tellurite glass microsphere and rare earth ion doped microsphere when the excitation light power and environment temperature change. The excitation power sensitivity of the silica microspheres was 32.4 pm/mW and the temperature sensitivity was 13.4 pm/℃. For the thulium ions doped silica microsphere, the sensitivity of excitation power was 48.7 pm/mw and the sensitivity of the environment temperature was 15.2 pm/℃. The excitation power sensitivity of the tellurite microsphere was 71.1 pm/mw, and the temperature sensitivity was 0.019 1 nm/℃, which was nearly one times higher than that of the FBG temperature sensor (10 pm/℃). If the rare earth ions were doped, the sensitivity was 1.1 times higher. The results have reference significance for the microcavity applications of the temperature sensor.