红外与毫米波学报, 2020, 39 (4): 397, 网络出版: 2020-09-17  

面向长距离通讯1 550 nm垂直腔面发射激光器的研究

1 550 nm VCSELs for long-reach optical interconnects
作者单位
1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing00083,China
2 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing00083,China
3 College of Material Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing100049,China
摘要
采用InP基衬底设计并制备了1550 nm垂直腔面发射激光器。采用混合镜面布拉格发射镜,其中顶部采用4.5对硅和二氧化硅的介电布拉格反射镜,同时采用隧道结的方式降低p层载流子吸收。制备出阈值电流在20 mA,室温直流下输出光功率为7 μW,激射波长为1554 nm,激射谱半高宽为3 nm的垂直腔面发射激光器。
Abstract
Long-wavelength VCSELs on an InP substrate was designed and fabricated with an active layer of 1550 nm. The top Distributed Bragg Reflection (DBR) mirror system has been constructed by fabricating 4.5 pairs of SiO2/Si top DBRs. The threshold current was 20 mA and maximum output power around 7 μW under continuous wave (CW) operation at room temperature. More importantly, the lasing spectrum is 1554 nm and the full width at half maximum is 3 nm.

刘丽杰, 吴远大, 王玥, 王亮亮, 安俊明, 赵有文. 面向长距离通讯1 550 nm垂直腔面发射激光器的研究[J]. 红外与毫米波学报, 2020, 39(4): 397. Li-Jie LIU, Yuan-Da WU, Yue WANG, Liang-Liang WANG, Jun-Ming An, You-Wen ZHAO. 1 550 nm VCSELs for long-reach optical interconnects[J]. Journal of Infrared and Millimeter Waves, 2020, 39(4): 397.

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