红外技术, 2019, 41 (11): 1003, 网络出版: 2020-01-07
小像元碲镉汞红外焦平面探测器的研究进展
Review of Small-pixel HgCdTe Infrared Focal Plane Detector
摘要
随着红外技术的发展, 探测器的尺寸、重量和功耗( SWaP)的减小已成为研究热点。像元尺寸的减小, 一方面可以提高器件的分辨率, 另一方面可以减小整个探测器系统的体积、重量和功耗, 进而大大节约成本。因此, 像元尺寸的减小成了研究的重点。本文介绍了小像元红外焦平面器件的技术难点, 分别从系统的调制传递函数(Modulation Transfer Function, MTF)、噪声等效温差(Noise Equivalent Temperature Difference, NETD)、像元结构和像元集成互连方面进行了讨论。此外, 介绍了国外像元中心距为 12 .m、10 .m、8 .m和 5 .m的 HgCdTe红外焦平面探测器的研究进展。
Abstract
With the development of infrared technology, the size, weight, and power consumption of detectors have become a common research focus. The decrease of pixel size can improve the resolution of a device and reduce the volume, weight, and power consumption of its entire detector system, consequently saving greatly on costs. Therefore, the decrease of pixel size has become a main focus of this research area. In this paper, the design difficulties of small-pitch infrared focal planes are introduced, and the modulation transfer function, noise equivalent temperature difference, pixel structure, and pixel hybridization are discussed, respectively. In addition, the research progress of the HgCdTe infrared focal plane detector with pitches of 12.m, 10.m, 8.m, and 5.m is introduced.
杨超伟, 李东升, 李立华, 李京辉, 封远庆, 杨毕春, 唐遥, 张志文, 李雄军, 李妍君. 小像元碲镉汞红外焦平面探测器的研究进展[J]. 红外技术, 2019, 41(11): 1003. YANG Chaowei, LI Dongsheng, LI Lihua, LI Jinghui, FENG Yuanqing, YANG Bichun, TANG Yao, ZHANG Zhiwen, LI Xiongjun, LI Yanjun. Review of Small-pixel HgCdTe Infrared Focal Plane Detector[J]. Infrared Technology, 2019, 41(11): 1003.