光电子快报(英文版), 2019, 15 (3): 190, Published Online: Jan. 7, 2020   

Fabrication of sapphire rib waveguides using a femtosecond laser

Author Affiliations
1 School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China
2 Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China1
Abstract
We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.

WANG Jue, TAO Qing, HU Chen, ZHAI Zhong-sheng, CHENG Jian, LIU Dun. Fabrication of sapphire rib waveguides using a femtosecond laser[J]. 光电子快报(英文版), 2019, 15(3): 190.

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