光电子快报(英文版), 2019, 15 (3): 190, Published Online: Jan. 7, 2020
Fabrication of sapphire rib waveguides using a femtosecond laser
Abstract
We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.
WANG Jue, TAO Qing, HU Chen, ZHAI Zhong-sheng, CHENG Jian, LIU Dun. Fabrication of sapphire rib waveguides using a femtosecond laser[J]. 光电子快报(英文版), 2019, 15(3): 190.