三维微结构在光陷阱、隐身与光场调控、超高压密封、人工生物材料等领域具有重要的应用价值。三维微结构的加工制造方法, 包括激光直写、光刻、电子与化学蚀刻等先进制造方法发展迅速, 其检测仪器有扫描电镜(SEM)、原子力显微镜(AFM)、激光共焦显微镜、低相干干涉显微镜, 但这些检测仪器一直受到西方发达国家垄断。阐述国内在低相干干涉显微测量方法方面的研究进展, 包括干涉显微镜的光学设计方法、装校流程、宽谱低相干干涉图处理与微结构形貌复原方法, 并给出了不确定度评定结果。结果表明: 仪器三维形貌合成不确定度为0.9 nm, 最大微结构轴向分辨率为0.13 nm。

The 3D micro-structures have important application value in the fields of optical trap, stealth and light field regulation, ultra-high pressure sealing and artificial biological materials.Advanced manufacturing methods for 3D micro-structures, including laser direct writing, photolithography, electronic and chemical etching, are rapidly developing. The detectors of Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), laser confocal microscopy, and low-coherence interference microscope are used, but these instruments are monopolized by foreign countries. This paper describes the research progress in low-coherence interference microscopy in China, including the optical design method of interference microscope, the assembly process, the wide-spectrum low-coherence interferogram processing and the micro-structure restoration method, and the evaluation of the uncertainty is given. The results show that the combined uncertainty of 3D morphology of the instrument is 0.9 nm and the maximum micro-structure axial resolution is 0.13 nm.