本文研究了硅片狭缝内水分子蒸发过程中的红外光谱吸收特性。通过改变相对于硅片狭缝的红外光偏振方向(水平: 偏振方向与硅片狭缝方向平行; 垂直: 偏振方向与硅片狭缝方向垂直), 测量了水分子在3 900~3 600 cm-1(伸缩振动)和1 800~1 400 cm-1(弯曲振动)的偏振红外光吸收。结果表明,经硅片间隙蒸发出来的水分子, 在3 900~3 600 cm-1(伸缩振动)和1 800~1 400 cm-1(弯曲振动)区间, 对垂直偏振光吸收较强, 对水平偏振光吸收较弱, 表明毛细效应导致蒸发的水分子偶极矩方向倾向于硅片狭缝的法线方向。

The characteristics of polarized infrared spectroscopy of water molecules in the silicon wafer slits during capillary evaporation were explored in this article. Associated with the slit of the silicon wafer, the direction of the infrared polarized light—horizontal: the polarized direction is parallel to the direction of the silicon wafer slit; vertical: the polarized direction is perpendicular to the direction of the silicon wafer slit—was changed to measure the polarized infrared absorption of water molecules at 3 900-3 600 cm-1 (stretching vibration) and 1 800-1 400 cm-1 (bending vibration). The results indicated that compared with horizontally polarized light, water molecules, which is evaporated from the slit of the silicon wafers, had a strong absorption for vertically polarized light in the range of 3 900-3 600 cm-1 (stretching vibration) and 1 800-1 400 cm-1 (bending vibration), demonstrating that the direction of dipole moment of water molecules evaporated by capillary action tends to the normal direction of the silicon wafers slit.