光学 精密工程, 2020, 28 (1): 90, 网络出版: 2020-03-25   

大行程快速反射镜的结构设计及带宽特性

Structural design and bandwidth characteristic of a fast steering mirror with large travel range
作者单位
上海交通大学 机械与动力工程学院, 上海 200240
摘要
为了解决音圈电机驱动的快速反射镜在大行程运动中电机动子和定子碰撞的问题, 设计了新型的快速反射镜柔性机构, 即采用柔性解耦机构来消除电机动子的横向位移。针对快速反射镜在大行程运动中由于力-位移的非线性特性而导致的共振频率随位置而变化的问题, 设计了变值陷波滤波器来消除随位置变化而改变的共振模态的影响, 并通过比例积分控制器实现闭环控制。与常值陷波滤波器相比, 变值陷波滤波器的共振频率为快速反射镜运动位置的函数。通过有限元分析和实验比较了采用常值和变值陷波滤波器时快速反射镜的带宽性能。实验结果表明, 采用常值陷波滤波器时, 当系统的运动位置小于15.2 mrad时, 快速反射镜沿θx和θy轴的带宽分别在95 Hz和110 Hz左右; 当系统运动到18.2 mrad时, θx和θy轴的带宽分别骤降为4792 Hz和571 Hz。采用变值陷波滤波器时, 快速反射镜沿θx和θy轴的带宽基本稳定在95 Hz和110 Hz, 说明了在运动行程较大的快速反射镜系统中设计变值陷波滤波器的必要性和有效性。
Abstract
For a Fast-Steering Mirror (FSM) driven by Voice Coil Motors (VCMs), the coil of the VCM touches the stator as the FSM achieves a broad range of motion. A novel FSM was developed to prevent the occurrence of undesired contact between the coil and stator. A compliant decoupling mechanism was designed to minimize the transverse displacement of the coil of the VCM. Moreover, for the FSM with a broad range of motion, the force-displacement relationship was nonlinear, which resulted in variable resonant frequencies at different motion positions. We developed a variable notch filter to eliminate the variable resonant modes, and a Proportional-Integral(PI) controller was designed to achieve closed-loop control. Compared to the fixed notch filter, the resonant frequencies of the variable notch filter were a function of the motion positions of the FSM. The bandwidth of the FSM was studied by finite-element analysis and experiments using fixed and variable notch filters. According to the experimental results, as a fixed notch filter was applied, the bandwidth of the FSM varied in different motion positions. When the motion position is less than 15.2 mrad, the bandwidths of the FSM along the θx and θy axes are approximately 95 Hz and 110 Hz, respectively; when the motion position is 18.2 mrad, the bandwidths of the θx and θy axes drop to 4792 Hz and 571 Hz, respectively. As a variable notch filter is applied, the bandwidths of the FSM along the θx and θy axes are stable at 95 Hz and 110 Hz, respectively; this result illustrates the need and effectiveness of applying a variable notch filter in an FSM system with a broad range of motion.

陈国真, 徐斯强, 刘品宽, 丁汉. 大行程快速反射镜的结构设计及带宽特性[J]. 光学 精密工程, 2020, 28(1): 90. CHEN Guo-zhen, XU Si-qiang, LIU Pin-kuan, DING Han. Structural design and bandwidth characteristic of a fast steering mirror with large travel range[J]. Optics and Precision Engineering, 2020, 28(1): 90.

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