微米光栅加速度计具有高精度、低功耗、小体积等优点, 在惯性导航、油气勘探、地震检波等领域有广泛的应用前景。文章针对传统微米光栅加速度计受到交叉轴串扰导致精度下降的问题, 提出了一种双层悬臂梁结构微米光栅加速度计敏感头。利用ANSYS有限元分析可知, 所设计的双层悬梁结构敏感头能有效抑制交叉轴串扰, 同时模态分离较传统结构提升13.5倍, 有效提高了敏感头抗高阶机械模态扰动的能力。

Micro-grating accelerometers have the advantages of high precision, low power consumption and small volume. It has wide application prospects in the fields of inertial navigation, oil and gas exploration, and seismic detection. In order to suppress cross-axis interference, a micro-grating accelerometer with double-layer cantilever structure is proposed. The ANSYS finite element analysis shows that the designed double-layer beam structure can effectively suppress cross-axis interference. The modal separation ratio is increased by 13.5 times compared with traditional structures, which effectively improves the resistance to high-order mechanical modal disturbances.