半导体光电, 2020, 41 (1): 15, 网络出版: 2020-04-13  

基于有限元法的12μm微测辐射热计单元设计

Design of 12μm Microbolometer Based on Finite Element Method
作者单位
电子科技大学 光电科学与工程学院, 成都 610054
摘要
基于多物理场有限元分析与理论计算相结合的方法, 采用Intellisuite软件完成了12μm×12μm微测辐射热计结构的设计与仿真, 具体工作包括: 单元结构二维版图及工艺流程设计和单元结构三维精确建模, 结合实际MEMS结构的材料参数, 进行了电学与热电耦合多物理场有限元仿真模拟分析。通过仿真优化获得探测单元的主要热电参数、响应时间和响应率, 分别为: 热导4.31×10-8W/K、热容2.69×10-10J/K、电压响应率(未经后端读出电路放大)7200V/W、热响应时间6.24ms。采用所提出的微桥设计仿真方法, 可显著提高器件设计效率和设计精度, 缩短研发周期, 可满足超大规模小像元非致冷红外焦平面探测器的设计要求。
Abstract
Combining the methods of multi-physics finite element analysis and theoretical calculation, a unit structure of 12μm×12μm microbolometer was designed and simulated by Intellisuite software, including: 2D layout of unit structure, process design and 3D accurate modeling of the unit structure. Based on the material parameters of actual MEMS structure, finite element simulations were performed by electrical and thermal-couple multiphysics. The main thermoelectric parameters, response time and response rate of the detection unit were obtained through simulation optimization. And the thermal conductivity of 4.31×10-8W/K, heat capacity 2.69×10-10J/K, voltage response rate of 7200V/W and the thermal response time of 6.24ms were obtained. The proposed micro-bridge design can improve the design efficiency and accuracy effectively, shorten the development cycle, and meet the design requirements of ultra-large-scale small-pixel uncooled infrared focal plane detectors.

史佳欣, 陈超, 王军. 基于有限元法的12μm微测辐射热计单元设计[J]. 半导体光电, 2020, 41(1): 15. SHI Jiaxin, CHEN Chao, WANG Jun. Design of 12μm Microbolometer Based on Finite Element Method[J]. Semiconductor Optoelectronics, 2020, 41(1): 15.

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