为了研究聚酰亚胺薄膜在308nm准分子激光下的剥离效果, 采用实验研究的方法, 分别探究了激光能量密度、光斑重叠率、脉冲频率、衬底温度对激光剥离效果的影响, 并结合显微镜观察剥离后的衬底和薄膜形貌。结果表明, 激光剥离能量阈值约为160mJ/cm2, 在激光能量密度为180mJ/cm2~190mJ/cm2左右、光斑重叠率为68.33%时, 剥离效果较好; 提高衬底温度有利于激光剥离过程。该研究对聚酰亚胺薄膜在柔性电子领域的工业化应用具有一定意义。

In order to study lift-off effect of polyimide films under 308nm excimer laser irradiation, by means of experimental research, the effects of laser energy density, spot overlap rate, pulse frequency and substrate temperature on laser lift-off were investigated. The morphologies of the stripped substrates and films were observed by microscopy. The results show that, the threshold of laser lift-off energy is about 160mJ/cm2. When laser energy density is about 180mJ/cm2~190mJ/cm2 and spot overlap rate is 68.33%, lift-off effect is better. Increasing the substrate temperature is beneficial for laser lift-off process. This study has certain significance for the industrial application of polyimide films in the field of flexible electronics.