光学技术, 2020, 46 (1): 1, 网络出版: 2020-04-13
97单元MEMS变形镜波前像差拟合能力分析
Analysis of fitting capability of 97-element deformable mirror to wavefront aberrations
摘要
变形镜是自适应光学系统的关键元件, 它对波前像差的拟合能力决定了自适应光学系统的校正性能。文中从变形镜对Zernike单阶像差、组合像差以及闭环校正三个方面分析97单元变形镜的拟合能力。仿真结果表明, 当原始波前均方根的值为一个波长时, Zernike多项式前3~42阶残余波前像差的RMS小于0.4λ, 说明变形镜对Zernike的前3~42阶像差具有较好的拟合能力。变形镜对Zernike多项式组合相差拟合以及基于随机并行梯度下降算法的闭环校正结果表明, 当波前像差较小时, 像差基本得到完全拟合及校正, 当波前像差较大时, 如D/r0=20时, 残余波前像差的RMS值均小于0.14λ (初始RMS为0.63λ)。分析结果对97单元变形镜的实际应用提供了理论依据和使用参考。
Abstract
Deformable mirror is a key component to the adaptive optics system. Its ability to fit the wavefront aberration determines the performance of the AO system. Fitting capability for DM was analyzed from the 3 aspect, including single order aberration of Zernike polynomial, combined aberration of Zernike polynomial and closed-loop correction. The results show that the 97-element DM has a good fitting ability to the first 3~42th single order of Zernike aberration. When the original wavefront RMS value was 1λ, the residual wavefront aberration RMS was less than 0.4λ. The fitting to combine
徐奇, 吴阳, 方舟, 杨海波, 杨慧珍. 97单元MEMS变形镜波前像差拟合能力分析[J]. 光学技术, 2020, 46(1): 1. XU Qi, WU Yang, FANG Zhou, YANG Haibo, YANG Huizhen. Analysis of fitting capability of 97-element deformable mirror to wavefront aberrations[J]. Optical Technique, 2020, 46(1): 1.