MoOx材料因其较低的反射率, 在窄边框液晶显示技术等领域是一种理想的材料。本文利用磁控溅射法在玻璃基板上制备MoOx薄膜, 并在MoOx薄膜上沉积不同的金属层, 采用不同的方法研究MoOx薄膜及其搭配金属层的特性。测试结果表明: MoOx和玻璃基板的粘附性较好, 无须打底膜可在玻璃基板上直接沉积; MoOx和Al及Cu的粘附效果优于Mo及MTD等Mo合金; MoOx薄膜的方块电阻值较大, 搭配金属层时可忽略不计; MoOx厚度对搭配金属膜的反射率及色差影响很大, 而金属层厚度影响较小。对于采用MoOx作低反材料的工艺, 可以根据MoOx材料的特性选择搭配不同的金属层, 在满足反射率等要求的基础上, 可通过调整MoOx层厚度来调整产品的色差, 以满足客户的颜色喜好需求。

MoOxthin film is considered to be an ideal choice in border-less TFT LCD for its low reflectivity. In this work, MoOx thin films are deposited at room temperature by utilizing magnetron sputtering on glass substrate. The properties of MoOx films, composite films of MoOx and different metal films are studied by different methods. The results show that MoOx film can be deposited on glass substrates without undercoating because of the good adhesion between them. The adhesion of MoOx to Al and Cu is better than that of Mo and Mo alloys, such as MTD. The square resistance of MoOx thin film is large and can be neglected when it is composed with metal layers. The thickness of MoOx has a great influence on the reflectivity of composite films of MoOxand metal film. Different MoOx thicknesses show different colors when it is composed with metal layers while the thickness of metal layer has little effect on color. In the production of border-less TFT LCD, metal layer can be choose according to the properties of MoOx to match with and the color of products can be adjusted by changing the thickness of MoOx layers to meet the color preferences of the customers on the basis of meeting the requirements of reflectivity.