光电子技术, 2019, 39 (3): 168, 网络出版: 2020-05-12
LNOI光电子集成芯片技术
Optoelectronic Integrated Chip Technologies Based on LNOI
薄膜铌酸锂 绝缘层上铌酸锂 集成微波光子 光电集成 thin film lithium niobate LNOI integrated microwave photonics optoelectronic integration
摘要
介绍了LNOI材料、光波导制备、光耦合和器件技术方面的研究进展, 并针对LNOI材料在光电集成芯片方面的发展进行了展望。
Abstract
Technologies about material, optical waveguide fabrication, optical coupling and devices of LNOI were introduced in this paper. Finally, the future development trends of LNOI-based optoelectronic integrated chip were prospected.
韩春林, 钱广, 胡国华. LNOI光电子集成芯片技术[J]. 光电子技术, 2019, 39(3): 168. HAN Chunlin, QIAN Guang, HU Guohua. Optoelectronic Integrated Chip Technologies Based on LNOI[J]. Optoelectronic Technology, 2019, 39(3): 168.
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