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Design and study of a long-wavelength monolithic high-contrast grating resonant-cavity-enhanced photodetector

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Abstract

Novel construction of a resonant-cavity-enhanced photodetector (RCE-PD) with monolithic high-contrast grating (HCG) is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In this structure, HCG serves as the top mirror of the RCE-PD, whereas InGaAs serves as a sacrificial layer to achieve monolithic integration. During the bandwidth optimization, the ratio of the thickness of the total intrinsic region and the absorption layer is introduced to realize the simultaneous optimization of the thickness of spacing layers and absorption layer. After structural optimization, the quantum efficiency of the device with diameter of 20 μm is 82% at 1 550 nm, and the 3-dB bandwidth is 34 GHz at a bias of 3 V.

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DOI:10.1007/s11801-019-8141-2

基金项目:This work has been supported by the National Natural Science Foundation of China (Nos.61674018, 61574019 and 61674020), the Specialized Research Fund for the Doctoral Program of Higher Education of China (No.20130005130001), the Beijing Municipality Natural Science Foundation (No.4132069).

收稿日期:2018-09-04

修改稿日期:2018-12-28

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ZENG Kun:State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
DUAN Xiao-feng:State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
HUANG Yong-qing:State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
LIU Kai:State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
REN Xiao-min:State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China

联系人作者:DUAN Xiao-feng(xiaofengduan@163.com)

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引用该论文

ZENG Kun,DUAN Xiao-feng,HUANG Yong-qing,LIU Kai,REN Xiao-min. Design and study of a long-wavelength monolithic high-contrast grating resonant-cavity-enhanced photodetector[J]. 光电子快报(英文版), 2019, 15(4): 250-254

ZENG Kun,DUAN Xiao-feng,HUANG Yong-qing,LIU Kai,REN Xiao-min. Design and study of a long-wavelength monolithic high-contrast grating resonant-cavity-enhanced photodetector[J]. Optoelectronics Letters, 2019, 15(4): 250-254

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