光电子快报(英文版), 2019, 15 (4): 260, Published Online: May. 20, 2020  

Fabrication and characterization of annealed proton exchanged long period waveguide grating in x-cut LiNbO3

Author Affiliations
Tianjin Key Laboratory of Film Electronic and Communication Devices, Engineering Research Center of Ministry of Education for Optoelectronic Devices and Communication Technology, School of Electrical and Electronic Engineering, Tianjin University of Technology, Tianjin 300384, China
Abstract
In this paper, a long-period waveguide grating was fabricated in x-cut lithium niobate substrate by patterned annealed proton exchange waveguide fabrication process. The waveguide mode characteristic was evaluated using a charge-coupled device (CCD) camera. It shows that the waveguide is single mode transmission at a wavelength of 1 550 nm. The transmission spectra of the long period waveguide gratings were measured by optical spectrum analyzer (OSA) and show an extinction ratio of ~17 dB and a 3 dB bandwidth of ~10 nm at the resonant wavelength. The resonant wavelength moves toward to the long wavelength direction as the waveguide width-difference increases in the same period, and also shifts toward to the long wavelength direction with the increase of the period in the case of the same waveguide width-difference. The method of fabricating a long period waveguide grating based on a patterned annealed proton exchange technique simplifies the fabrication process, and at the same time, reduces the fabrication cost.

ZHANG Ai-ling, GENG Bo, HAO Li-yue, LI Dan. Fabrication and characterization of annealed proton exchanged long period waveguide grating in x-cut LiNbO3[J]. 光电子快报(英文版), 2019, 15(4): 260.

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