针对当前微纳米测量中存在的大范围高精度测量及复杂微结构几何参数表征难题, 基于多测头传感和精密定位平台复用技术, 开发了一台具有多种测量尺度和测量模式的复合型微纳米测量仪。为使其具备大范围快速扫描测量和小范围精细测量功能, 仪器集成了白光干涉和原子力显微镜两种测头, 通过设计适用于两种测头集成的桥架结构及宏/微两级驱动定位平台, 实现整机的开发。为保证仪器测量结果的准确性和溯源性, 利用标准样板对开发完成的仪器进行了校准。仪器搭载的白光干涉测头可以达到横向500 nm, 纵向1 nm的分辨力; 原子力显微镜测头横向和纵向分辨力均可达到1 nm。最后, 利用目标仪器对微球样品进行了测量, 通过大范围成像和小范围精细扫描, 获得了微球的表面特征, 验证了仪器对复杂微结构的测量能力。

To solve the problems of large-scale and high-precision measurement as well as geometrical parameter characterization of complex microstructures, a composite micro-and nano-measuring instrument was developed based on multi-probe sensing and precise positioning platform multiplexing technology. To realize high-speed scans of a large area and fine measurement of a small area, a White Light Interference(WLI) microscope and an Atomic Force Microscope (AFM) were integrated into the bridge structure of the instrument.A macro/micro-driving platform was designed and tested to meet the positioning range and accuracy requirements. The instrument could work on in a contact or noncontact mode.Furthermore, different geometrical parameters could be characterized by the instrument. The instrument was calibrated using a nano dimensional standard to ensure accuracy and traceability. The WLI resolution of the instrument can reach 500 nm in the lateral direction and 1 nm in the vertical direction. The AFM resolution is better than 1 nm in both the lateral and vertical directions. Lastly, a micro ball was measured and its surface geometrical characteristics were obtained by large-range imaging and small-range fine scanning. Thus, the instrumental capability was verified.