离子注入已被证明是改善蓝宝石光学和机械表面性能的一种可靠方法。本文选择不同能量和剂量的镁/钛离子注入蓝宝石。利用TRIM (Transport of Ion Matter)程序分析了镁/钛离子在蓝宝石晶体中的射程分布。利用拉曼光谱和掠入射X射线衍射分析了损伤层深度和微结构变化。离子注入结果显示，蓝宝 石的纳米硬度、纳米划痕和红外性能等均呈现出可调节的特性。

Ions implantation has proven to be a reliable way for sapphire to create new optical and mechanical surface properties. In this paper, the magnesium/titanium ions were chosen to implant in the surface modification of sapphire with different ions energy and fluence. The projected range and straggling of ions were calculated by simulation program of the Transport of Ion Matter code. Information about the damage depth distribution and the occurrence of microstructural modifications were analyzed by Raman spectroscopy and glancing incidence X-ray diffraction. According to the test results, the nanohardness, nanoscratch and infrared properties of sapphire show a tunable property with the ion implantation.