人工晶体学报, 2020, 49 (4): 576, 网络出版: 2020-06-15
CdSe波片 6~12 μm波段增透膜研究
Study on 6-12 μm Anti-reflection Coating for CdSe Wave Plate
摘要
采用垂直无籽晶气相升华法生长出直径37 mm的优质硒化镉(CdSe)单晶体,并沿光轴方向切割出20 mm×20 mm×3 mm的CdSe波片初胚。经研磨和抛光,在2~20 μm波段CdSe波片的红外透过率约为70%。为进一步提高波片的透过率,采用Essential-Macleod软件辅助设计方案,选用YF3和ZnS为双层增透膜材料,并获得最佳的膜系厚度。镀膜后的CdSe波片在6~12 μm波段透过率达到90%,在10.5 μm处的透过率最高,峰值高达99%。
Abstract
High quality CdSe single crystal with diameter of 37 mm was grown by the modified vertical unseeded sublimation method, and the embryo of CdSe wave plate with size of 20 mm×20 mm×3 mm was cut along the optical axis. After grinding and polishing, the infrared transmittance test results show that the transmittance of the CdSe wave plate in the range of 6-12 μm was about 70%. In order to further increase the transmittance of the CdSe wave plate, the Essential-Macleod software-assisted design solution was adopted. YF3 and ZnS were selected as the two-layer anti-reflection coating materials, and the optimal film thickness was obtained. The coated CdSe wave plate had a transmittance of 90% in the 6-12 μm band, and the highest transmittance at 10.5 μm, with a peak of 99%.
杨明, 杨辉, 张志勇, 田文, 明仕文, 张敏, 曾体贤. CdSe波片 6~12 μm波段增透膜研究[J]. 人工晶体学报, 2020, 49(4): 576. YANG Ming, YANG Hui, ZHANG Zhiyong, TIAN Wen, MING Shiwen, ZHANG Min, ZENG Tixian. Study on 6-12 μm Anti-reflection Coating for CdSe Wave Plate[J]. Journal of Synthetic Crystals, 2020, 49(4): 576.