半导体光电, 2020, 41 (2): 247, 网络出版: 2020-06-17  

面向毫克级仿昆扑翼微飞行器的力-力矩传感器

Lift-Torque Sensor Applied for Insect-Inspired Flapping-Wing Micro Air Vehicle
孟冉 1,2张卫平 1,*王晨阳 1,2周岁 1,2魏铭辰 1,2
作者单位
1 上海交通大学 1. 微米/纳米加工技术重点实验室
2 2. 电子信息与电气工程学院微纳电子学系, 上海 200240
摘要
毫克尺度微型仿生飞行器基于柔性高频翅拍运动的升力机制, 具有柔性大变形、振动非线性、多自由度力-力矩耦合等特征, 其有效升力/力矩范围处于mN/(μN·m)量级, 通用力传感器较难准确测定力学参数, 进而给微型仿生飞行器的设计与控制带来一定的困难。文章提出了一种面向微型扑翼飞行器的新型力-力矩传感器, 它可以在固定约束条件下实现微飞行器高频扑翼运动产生的升力和力矩的测量, 为扑翼飞行器控制力和力矩解耦研究提供精度较高的数据。该传感器采用对称式多悬臂梁柔顺机构将升力/力矩转化为微小形变, 结合高带宽、高精度电容位移测量装置, 可以采集高频振动条件下的微小升力/力矩。基于梁理论进行了传感器力学建模, 并结合有限元仿真验证了原理的可行性。对被测对象微型仿生扑翼飞行器的主要测量参数范围开展结构与工艺设计, 实验结果显示, 该传感器的升力测量范围为-10~10mN, 力矩测量范围为-20~20μN·m, 特征频率为1kHz, 升力和力矩的灵敏度分别为0.01mN和0.01μN·m, 经验证, 对整机重量在80~250mg、工作频率在1~200Hz范围的微型扑翼飞行器具有较强的适用性。
Abstract
Due to high-frequency flapping motion, the insect-inspired flapping-wing micro air vehicles(FMAV)present the characteristics of flexible and large deformation, nonlinearity vibration, force-torque coupling, etc. The lift force and torque generated by IFMAV is about mN and μN·m respectively, but it is difficult to accurately test small force and torque, which brings challenges for the structure design and control of the FMAV. In this paper, a novel force-torque sensor for the IFMAV is presented, which can measure the high-frequency lift force and torque generated by the IFMAV under fixed constraints. The lift-torque senor is designed to use a symmetrical multi-cantilever compliant mechanism to convert lift force/torque into a small deformation. Combined with a high-bandwidth, high-precision capacitive displacement measuring device, it can collect data of lift force/torque under high-frequency vibration conditions. In this paper, the sensor mechanics modeling is based on the beam theory, and it is verified by finite element simulation. The structure is designed and processed based on the main parameters of the IFMAV. Experimental test indicate that such features as the lift measurement range of -10~10mN, torque measurement range of -20~20μN·m, characteristic frequency of 1kHz, and the sensitivity of lift and torque of 0.01mN and 0.01μN·m respectively, were obtained. This sensor meets the test requirements of IFMAV which weights between 80~250mg and works in the range of 1~200Hz frequency.

孟冉, 张卫平, 王晨阳, 周岁, 魏铭辰. 面向毫克级仿昆扑翼微飞行器的力-力矩传感器[J]. 半导体光电, 2020, 41(2): 247. MENG Ran, ZHANG Weiping, WANG Chenyang, ZHOU Sui, WEI Mingchen. Lift-Torque Sensor Applied for Insect-Inspired Flapping-Wing Micro Air Vehicle[J]. Semiconductor Optoelectronics, 2020, 41(2): 247.

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