半导体光电, 2020, 41 (3): 443, 网络出版: 2020-06-18  

多环谐振式微机械陀螺频率跟踪电路研究

Research on Frequency Tracking Circuit of Multi-ring Resonant Micromachined Gyro
作者单位
1 上海交通大学 1. 微米/纳米加工技术国家级重点实验室, 上海 200240
2 电子信息与电气工程学院 微纳电子学系, 上海 200240
摘要
由于多环谐振式微机械陀螺的谐振频率较高, 传统的数字控制电路对陀螺幅点信号的频率跟踪难以同时兼顾精度和速度的要求。在传统半球陀螺数字控制电路的基础上, 提出了一种适用于多环谐振式微机械陀螺仪的频率跟踪电路, 并首次运用于多环谐振式微机械陀螺。该电路以高速A/D转换电路为基础, 通过对幅点信号高速采样计算频率和相位信息, 并通过CORDIC算法产生输出信号。测试结果显示, 该电路使多环谐振式微机械陀螺幅点信号的频率跟踪精度达到了0.78Hz, 频率跟踪时间小于40μs, 使控制电路的性能得到了极大提升。
Abstract
Due to the high resonance frequency of the multi-ring resonant micro-mechanical gyro, the traditional digital control circuit can not accurately balance the accuracy and tracking speed of the gyro amplitude signal. Based on the traditional hemispherical gyro digital control loop, a frequency tracking circuit is proposed for multi-ring resonant micro-mechanical gyroscopes, and it is applied to multi-ring resonant micro-mechanical gyros for the first time. The circuit is based on a high-speed A/D conversion circuit. The frequency and phase information is calculated by high-speed sampling of the amplitude signal, and the output signal is generated by the CORDIC algorithm. Test results show that the circuit makes the frequency tracking accuracy of the multi-ring resonant micro-mechanical gyro amplitude signal reach 0.78Hz, and the frequency tracking time is less than 40μs, which greatly improves the performance of the control circuit.

薛冰, 张卫平, 王子杰, 田梦雅, 谷留涛. 多环谐振式微机械陀螺频率跟踪电路研究[J]. 半导体光电, 2020, 41(3): 443. XUE Bing, ZHANG Weiping, WANG Zijie, TIAN Mengya, GU Liutao. Research on Frequency Tracking Circuit of Multi-ring Resonant Micromachined Gyro[J]. Semiconductor Optoelectronics, 2020, 41(3): 443.

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