简述了X射线荧光(XRF)分析与微束X射线荧光(MXRF)分析的技术特点、 仪器构成、 应用领域和工作范围。 从准直的微束X射线荧光、 整体X射线荧光与微束X射线荧光组合、 波谱/能谱多功能组合和毛细管X光会聚透镜微束X射线荧光仪器四类仪器评介了中国微束X射线荧光仪器和分析技术的应用与发展。 从分析功能定位和技术发展两方面, 展望了微束X射线荧光技术的发展。 提出将XRF分析中传统的微束原位(微区)XRF(MXRF)分析进一步区分为“微-纳区分析(μ/n-XRF)”和“微-毫区分析(μ/m-XRF)”, 如此区分该项技术及适用范围定位, 对两者原位分析技术的发展都是有益的, 特别也明确定位说明了整体/微区组合仪器的功能和适用范围发展与应用。 作者强调: 原位(微区)分析并非仅为单纯的分析工作, 更重要的在于对被测样品特性的研究与结果解读！ 分析人员和专业科学家的密切合作, 才能充分发挥原位微区分析技术的效能, 充分解读展现分析结果的科学意义。

The technical characteristics, instrument composition, application fields and working scope of X-ray fluorescence (XRF)and micro-X-ray fluorescence analysis (MXRF)are briefly described. The development of micro-X-ray fluorescence instruments and analytical techniques in China is reviewed from four aspects: collimated microbeam X-ray fluorescence instrument, integrated X-ray fluorescence and micro-X-ray fluorescence instrument, micro-X-ray fluorescence function in multifunctional (spectrum/energy spectrum) instrument and capillary X-ray convergent lens micro-X-ray fluorescence instrument. Finally, the development of micro-X-ray fluorescence technology has prospected from two aspects of functional positioning and technological development. It is proposed that the traditional in-situ microanalysis can be further divided into “μ-n(area)-analysis(μ-XRF)” and “sub-mm-cm(area)-analysis(MXRF)”. This kind of technical distinction and application scope positioning is beneficial to the development of in-situ microanalysis technology, and also provides a clear positioning for the development and application of integrated/micro-zone combination instruments. The author also emphasizes that in-situ microanalysis is not a simple analytical problem, but more importantly, the study of the properties of the tested materials and the reasonable interpretation of the results. Close cooperation between analytical technicians and professional scientists can give full explain to the effectiveness of in-situ analytical techniques and analyze the scientific significance of analytical results in detail.